Low temperature plasma is the matter fourth state after solid, liquid and gas state. When the impressed voltage reaches the air’s discharge voltage, the air breakdown will generate the mixture which includes electron, all kinds of ion, atom and free radical. During the discharge process, although the electron temperature is very high, the heavy particle temperature is very low, the whole system is in low temperature state, so it is called low temperature plasma. The low temperature plasma can degrade the pollutant. The principle is as below: make use of these high-power electron, free radical and other active particles and the pollutant effect in the waste air, the pollutant will resolve within a very short time, and the subsequent reaction will happen in order to achieve the purpose of the pollutant degradation.* DBD plasma reaction zone is rich in material, such as high-power electron, ion, free radical and excited state molecule, the waste air pollutant can react with these high- energy substance, which makes the pollutant decomposition happens within a very short time, and the subsequent reaction will happen in order to reach the purpose of pollutant degradation. Compared with the low-temperature plasma technology generated by the traditional corona discharge, DBD plasma technology is 50 times as high as the corona discharge, and the discharge density is 130 times than the corona discharge density. Therefore, the traditional low temperature plasma technology can only be used for indoor air odor control, compared with other low temperature plasma technology, DBD plasma technique is the only technology used for industrial waste air treatment.